On the use of image correlation for stabilization purposes in a sem-based x-ray tomography system

We present recent improvements in a SEM-based X-ray tomography system that optimize the generation of X-rays and improve its detection efficiency. A particularly important element in achieving these targeted improvements has been the use of FFT-based image correlation for stabilizing the X-ray flux through the specimen. Results show that a wide range of spatial resolutions can be selected each with adapted scan times.