An Ultrasonic Tweezer With Multiple Manipulation Functions Based on the Double-Parabolic-Reflector Wave-Guided High-Power Ultrasonic Transducer
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control(2020)
摘要
The development of ultrasonic tweezers with multiple manipulation functions is challenging. In this work, multiple advanced manipulation functions are implemented for a single-probe-type ultrasonic tweezer with the double-parabolic-reflector wave-guided high-power ultrasonic transducer (DPLUS). Due to strong high-frequency (1.49 MHz) linear vibration at the manipulation probe's tip, which is excited by the DPLUS, the ultrasonic tweezer can capture microobjects in a noncontact mode and transport them freely above the substrate. The captured microobjects that adhere to the probe's tip in the low-frequency (154.4 kHz) working mode can be released by tuning the working frequency. The results of the finite-element method analyses indicate that the manipulations are caused by the acoustic radiation force.
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关键词
Double-parabolic-reflector wave-guided high-power ultrasonic transducer (DPLUS),multifunctional manipulation,ultrasonic tweezers
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