Modeling and Analysis of a Hysteretic Deformable Mirror with Electrically Coupled Actuators
2020 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM)(2020)
摘要
In this paper, we present our novel concept of deformable mirror which enables a high density 2D actuation array through multiplexing. We investigate the resulting electrical coupling effect in the neighboring actuators through finite element analysis. These insights are used to consider the behavior within the least-square fitting performed to achieve wavefront error corrections.
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关键词
electrically coupled actuators,high density 2D actuation array,multiplexing,resulting electrical coupling effect,neighboring actuators,finite element analysis,hysteretic deformable mirror
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