Silicon Microring Modulator Driven By Transparent Conductive Oxide Capacitor

Erwen Li,Bokun Zhou,Wei-Che Hsu,Alan X. Wang

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

We experimentally demonstrated a novel silicon microring modulator driven by transparent conductive oxide capacitor, achieving a large tuning efficiency of 95 pm/V. Analysis indicates that a potential high-speed operation above 44GHz can be reached. (C) 2020 The Author(s)

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关键词

Transparent conducting film,Indium tin oxide,Silicon,Capacitor,Waveguide (optics),Logic gate,Optoelectronics,Modulation,Materials science

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