A novel compliant mechanism based system to calibrate spring constant of AFM cantilevers

•A novel compliant mechanism based system to calibrate the spring constant of AFM cantilevers has been proposed.•The calibration system is mainly composed of a compliant suspension mechanism and an electromagnetic actuator.•An electromagnetic actuator is employed to provide calibration force and a capacitance sensor is utilized to monitor the displacement of the suspension mechanism.•The prototypes of the calibration system are established and experimental study is carried out.