A micromachined vector light sensor

Dong Hao Zhuo,Ashish Rai,Siamack Vosoogh-Grayli,Gary W. Leach,Behraad Bahreyni

Sensors and Actuators A: Physical（2020）

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摘要

•The design and operating principles for a novel micromachined light sensor with the ability to measure the angle of incidence for a beam of light in addition to its intensity.•Microfabrication details to build the 3D structure of the sensor.•Characterization results for fabricated samples.•Utilization of arrayed devices for passive optical proximity detection.

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关键词

Optical sensors,Angular detection,Position sensing,Microfabrication,Vector sensing,Proximity sensing

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