Sputtering and high-tempereture annealing of AlN on diamond substrate Tatsuya Shirato,Yusuke Hayashi, Kenjiro Uesugi,Kanako Shojiki,Hideto MiyakeThe Japan Society of Applied Physics(2019)引用 0|浏览10暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要