Material Innovation in the Era of Artificial Intelligence - A Case Study of Hf-Zr Systems

2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)(2020)

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摘要
In this work, we presented the Hf-Zr system as a case study of materials that were evaluated in the past and are now receiving renewed interest due to its potential use in artificial intelligence (AI). A historical overview of Hf-Zr research and its promising new applications for emerging memories will be shared.
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关键词
artificial intelligence,emerging memories,RRAM,FRAM,capacitor,ferroelectric,HfZrO,new materials
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