Time Stability Characterization of Quadrupole Mass Spectrometers
Measurement(2020)
摘要
•Time stability of eight QMSs was investigated over 2-years period.•Stability of sensitivity of Faraday cup detector and SEM gain for He and N2.•Stability of peak position and peak width of He and N2.•Stability of minimum detectable partial pressure for He.•Measurements were carried out according to ISO TS 20175:2018.
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关键词
Quadrupole mass spectrometer,Time stability,Sensitivity,Mass number stability,Mass resolution,Secondary electron multiplier,Minimum detectable partial pressure
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