Carbon-backed thin tin ( 116 Sn) isotope target fabrication by physical vapor deposition technique

JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY(2020)

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摘要
In nuclear reaction experiments, the thin targets are required. In the present work, 30 thin 116 Sn targets were prepared using physical vapor deposition technique (preferable for thin film fabrication) on carbon backing with usage efficiency of 98%. The carbon-backed thin target films along with the parting agents are deposited on the particular substrates using a diffusion pump based coating unit. The thicknesses of the targets were verified using α-energy loss and RBS technique and they were in good agreement with each other. The purity of the target, verified using RBS, EDS and XRD techniques, were also tested with confirmation.
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关键词
Physical vapor deposition, Carbon-backed 116Sn target, Rutherford backscattering spectroscopy, Energy dispersive X-ray spectroscopy, Thin film, X-ray diffractometer
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