MEMS FPI-based smartphone hyperspectral imager

Proceedings of SPIE(2016)

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摘要
This paper demonstrates a mobile phone-compatible hyperspectral imager based on a tunable MEMS Fabry-Perot interferometer. The realized iPhone 5s hyperspectral imager (HSI) demonstrator utilizes MEMS FPI tunable filter for visible-range, which consist of atomic layer deposited (ALD) Al2O3/TiO2-thin film Bragg reflectors. Characterization results for the mobile phone hyperspectral imager utilizing MEMS FPI chip optimized for 500 nm is presented; the operation range is lambda = 450 - 550 nm with FWHM between 8 - 15 nm. Also a configuration of two cascaded FPIs (lambda = 500 nm and lambda = 650 nm) combined with an RGB colour camera is presented. With this tandem configuration, the overall wavelength tuning range of MEMS hyperspectral imagers can be extended to cover a larger range than with a single FPI chip. The potential applications of mobile hyperspectral imagers in the vis-NIR range include authentication, counterfeit detection and potential health/wellness and food sensing applications.
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关键词
Mobile hyperspectral imaging,Smartphone spectroscopy,MEMS Fabry-Perot interferometer,MOEMS,microspectrometers,ALD
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