In-Phase Hexagonal Implant-Defined Coherently Coupled Vertical Cavity Surface Emitting Laser Array

Hexagonal in-phase implant-defined coherently coupled array was presented. The array exhibited high beam quality with divergence angular of 2.5degrees. The array can maintain in-phase single mode in a considerably wide current range from 10mA (I-th) to 35mA (3.5xI(th)). The maximum output power of the array is 4.9mW under pulse wave condition. Simulation of far-field profile was carried out to match the in-phase operation test results. The modal behavior of the array was also investigated.