The influence of PVD/CVD processes parameters on Ni catalyst nanoparticles sizes

In this work we demonstrate how technological parameters of PVD/CVD method influence the growth of Ni particles' sizes where carbon nanotubes films are grown. In CVD process we changed the growth temperature while other parameters were kept strictly constant. Carbon nanotubes (CNTs) were grown on carbonaceous-nickel substrates by chemical vapor deposition (CVD) of xylene gas at the temperature range 600-700 degrees C. Ni particles' sizes affect diameters, length and distribution density of carbon nanotubes obtained in different temperatures of CVD processes.