Advanced ASIC with Internally Generated Dynamic Magnetic Field Simulating its Moving

A magnetic MEMS with ASIC is presented in the paper using Hall element array for the angle and the position measuring of moving magnetic field, either for its rotary angle or for its linear position measurement. The advantage of the proposed method is to perform an onboard sensitivity testing of the Hall elements without using a complex external magnetic test set up. Preferably acquired data of spatial distribution of the magnetic field could be used in the process of trimming to evaluate correction factors for offset and sensitivity of the Hall elements or the whole system to yields higher robustness.