Preparation of high transmittance TiO2 thin films by sol-gel technique as antireflection coating
Journal of Physics Conference Series(2018)
摘要
In this present work sol-gel technique with spin coating method is used to deposit Titanium dioxide thin films on glass substrates as anti-reflection coating (ARC) films. Nano crystalline TiO2 (anatase phase) is obtained after heating at 550 degrees C for 2 h. The optical properties of TiO2 films were studied by UV-Vis absorption/reflection spectroscopy, the average transmittance of monolayer coated on glass substrates was greater than 95% in the wavelength range of 300-1000 nm.
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关键词
Sol-gel technique,spin coating method,thin films,antireflection coating
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