Wafer‐Scale Fabrication of Nanopore Devices for Single‐Molecule DNA Biosensing Using MoS 2

Atomically thin (2D) nanoporous membranes are an excellent platform for a broad scope of academic research. Their thickness and intrinsic ion selectivity (demonstrated for example in molybdenum disulfide-MoS2) make them particularly attractive for single-molecule biosensing experiments and osmotic energy harvesting membranes. Currently, one of the major challenges associated with the research progress and industrial development of 2D nanopore membrane devices is small-scale thin-film growth and small-area transfer methods. To address these issues, a large-area protocol including a wafer-scale monolayer MoS2 synthesis, Si/SiNx substrate fabrication and wafer-scale material transfer are demonstrated. First, the 7.62 cm wafer-scale MOCVD growth yielding homogenous monolayer MoS2 films are introduced. Second, a large number of devices are fabricated in one batch by employing the wafer-scale thin-film transfer method with high transfer efficiency (>70% device yield). The growth, the transfer quality and cleanliness are investigated using transmission electron microscopy, atomic force microscopy and Raman spectroscopy. Finally, the applicability and robustness of the large-area protocol is demonstrated by performing a set of double-stranded DNA translocation experiments through as-fabricated MoS2 nanopore devices. It is believed that the shown approach will pave the way toward wafer-scale, high-throughput use of 2D nanopores in various applications.