Lithography Compatible, Flexible Micro-Organic Light-Emitting Diodes by Template-Directed Growth

In this work, high-resolution flexible micro-organic light-emitting diodes (micro-OLEDs) are presented by template-directed growth. The templates are prepared by parallel patterning techniques (nanotransfer printing and photolithography) to create prepatterns on flexible substrates. The prepatterns act as nucleation sites and induce area-selective growth of organic semiconductor molecules upon deposition. By optimization of growth parameters such as substrate temperature and growth rate, uniform patterns of diverse light-emitting materials can be realized with feature sizes down to hundreds of nanometers, including orange, blue, and green emissions on the flexible substrates. Flexible micro-OLEDs are further demonstrated based on the patterned organic semiconductors. By combination of parallel patterning techniques, this work provides a high yield and resolution patterning way for flexible organic electronics over large areas.