Laser-Written Silicon-Germanium Alloy Microstructures With Tunable Compositionally Graded Profiles

Ozan Aktas,Stuart J. MacFarquhar,Swe Z. Oo,Vinita Mittal,Harold M. H. Chong,Anna C. Peacock

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

A laser processing method is introduced for post-deposition tailoring of local composition and bandgap in amorphous silicon-germanium thin films on silicon substrates. Spatial distribution of the alloy constituents can be controlled through the scan speed. (C) 2020 The Author(s)

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关键词

laser-written silicon-germanium alloy microstructures,laser processing method,local composition,bandgap,amorphous semiconductor thin films,silicon substrate,spatial distribution,laser scan speed,Si1-xGex,Si

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