Direct Patterned Growth Of Pecvd Graphene Transparent Electrodes On Gan Led Epiwafers Using Co As A Sacrificial Catalyst Layer

Fangzhu Xiong,Weiling Guo,Yibo Dong,Le Wang,Zaifa Du,Jie Sun

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

Co acts as both an etching mask and a catalyst for the growth of grapheme, high-quality graphene can be obtained quickly and at low temperatures for transparent electrode applications on GaN LEDs. (c) 2020 The Author(s)

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关键词

grapheme growth,GaN LED epiwafers,etching mask,catalyst layer,PECVD graphene transparent electrodes,direct patterned growth,GaN,Co,C

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