ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows
Frontiers in Optics(2020)
摘要
High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.
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