Driver Circuit Improvement of Eddy Current Sensor in Displacement Measurement of High-Speed Rotor

Displacement sensor is the key component of the magnetic levitation system. Reducing complexity and improving reliability of the sensor circuits are very important to mass production of magnetic levitation devices. In this article, an improved driver circuit of eddy current sensor is proposed. In order to generate a stable oscillating source with high stability and good precision of frequency, a crystal oscillator circuit with power boost is used to replace the traditional Colpitts oscillator circuit. The improved modulation circuit is composed of passive components with a simple structure for improving reliability. The parameters design method of the modulation circuit is analyzed in detail, which greatly affects the sensitivity and linearity of the sensor. The experimental results show that the designed eddy current sensor has good linearity (1.12%) and sensitivity (2.14 V/mm), and it can ensure the stable operation of the magnetic levitated turbomolecular pump at the rated speed.