Differential manometer with reflective optical sensor

Predrag S. Iskrenović,Goran B. Sretenović,Milorad M. Kuraica

Measurement（2021）

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摘要

•Differential manometer with a completely free membrane has been constructed.•Manometer is based on the use of reflective optical sensor.•Such a configuration is highly resistant to the presence of ionized gasand charged particles.•Achieved sensitivity is better than 1 Pa.•The range of 1 Pa − 100 kPa is covered.

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关键词

Differential manometer,Membrane,Reflective optical sensor

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