Epitaxial growth of cubic WCy(001) on MgO(001)

Peijiao Fang,Baiwei Wang, C.P. Mulligan, T.M. Murray,S.V. Khare,Daniel Gall

Journal of Alloys and Compounds（2021）

引用 9|浏览12

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摘要

•Epitaxial WCy(001) layers with 0.47 ≤ y ≤ 0.68 are deposited on MgO(001).•First-principles calculations predict a lattice parameter ao = (0.4053 + 0.0295 y) nm.•Cubic WCy phase is stabilized by carbon vacancies.•Growth beyond d = 10 nm leads to an epitaxial breakdown.

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关键词

Tungsten carbide,Epitaxy,X-ray diffraction,Hard coating,Vacancy,Sputter deposition

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