Inverse response behaviour in the bright ring radius measurement of the Czochralski process I: Investigation

Journal of Crystal Growth(2021)

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摘要
•Inverse response of the diameter measurement in Czochralski crystal growth.•Anomaly fundamentally limits the performance of feedback control systems.•Ray tracing model for precise calculation of the measured bright ring.•Rigorous model describing the bright ring dynamics in terms of a transfer function.
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关键词
A1. Growth models,A1. Process control,A2. Czochralski method,B2. Semiconducting silicon
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