Atomically sculptured heart in oxide film using convergent electron beam

Applied microscopy(2021)

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摘要
We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO 3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO 3 /crystalline SrTiO 3 .
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关键词
Electron beam irradiation,Epitaxial crystallization,Nanoarchitectonics,Spherical aberration corrected scanning transmission electron microscope
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