Lateral Mode Tuning in Coupled Ridge Waveguides Using Focused Ion Beam

A. S. Payusov,A. A. Serin,G. O. Kornyshov,M. M. Kulagina,M. I. Mitrofanov,G. V. Voznyuk,V. P. Evtikhiev,M. V. Maximov,N. Yu. Gordeev

SEMICONDUCTORS（2021）

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摘要

We present an approach for the treatment of coupled-ridge lasers using focused ion beam⁠ (FIB) etching. We show experimentally that the FIB etching allows post-processing lateral mode tuning without deterioration of the main laser parameters.

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关键词

diode lasers, optical waveguides, focused ion beam

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