High-coupling leaky surface acoustic wave on hetero acoustic layer structures based on ScAlN thin film with c-axis tilt angle

Japanese Journal of Applied Physics(2021)

引用 0|浏览1
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要