Dashboard for CMOS Parametric Yield and Performance Monitoring in Semiconductor Manufacturing
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)(2021)
摘要
This work describes different aspects of a dashboard for CMOS performance monitoring and parametric yield related data mining. This interactive data-driven dashboard based on a systematic strategy displays relevant metrics and trends influencing device performance at a single location. It significantly improves device performance control in a high-volume high mixing semiconductor fabrication facil...
更多查看译文
关键词
Performance evaluation,Fabrication,Visualization,Semiconductor device measurement,Systematics,Metrology,Drives
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要