Dashboard for CMOS Parametric Yield and Performance Monitoring in Semiconductor Manufacturing

2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)(2021)

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摘要
This work describes different aspects of a dashboard for CMOS performance monitoring and parametric yield related data mining. This interactive data-driven dashboard based on a systematic strategy displays relevant metrics and trends influencing device performance at a single location. It significantly improves device performance control in a high-volume high mixing semiconductor fabrication facil...
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关键词
Performance evaluation,Fabrication,Visualization,Semiconductor device measurement,Systematics,Metrology,Drives
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