A Novel Preparation Of Ag Agglomerates Paste With Unique Sintering Behavior At Low Temperature

MICROMACHINES(2021)

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摘要
A novel bonding process using Ag agglomerates paste prepared by Ag2O reduction has been proposed, which solved the problem of Cu substrate oxidation in the conventional Ag2O sintering process for Cu-Cu bonding. By applying the Ag agglomerate paste to Ag-Ag bonding, a shear strength of 28.3 MPa at 150 degrees C was obtained. Further studies showed that the optimum sintering temperature was at 225 degrees C, and a shear strength of 46.4 MPa was obtained. In addition, a shear strength of 20 MPa was obtained at 225 degrees C for Cu-Cu bonding. Compared to common Ag pastes, the results in this paper revealed that the sintering behavior of Ag agglomerates was unique, and the sintering mechanisms for Ag-Ag and Cu-Cu bonding were also discussed.
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关键词
Ag agglomerates, sintering, Pt-catalyzed formic acid, low temperature
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