Closed-Loop Control Strategy For Acoustic Microrobot Based On Vibration Of Microstructure

2020 15th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA)(2021)

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摘要
Precise and robust motion control of micro/nano-particles holds great promise for the next generation of lab-on-chip systems and micro-machine devices. Here, we present a new method to precisely control the motion of microparticles. This system utilizes vision feedback to help the microparticle automatically adjust its position and eventually make sure the final positional deviation of the micro-p...
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关键词
Vision feedback control,Closed-loop,Acoustic streaming,Targeted transportation
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