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Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXVI(2021)

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摘要
We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.
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关键词
ultrafast laser processing,lithium niobate on insulator,microresonator,amplifier,micro-reactor
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