Stretching-Tunable High-Frequency Magnetic Properties Of Wrinkled Cofeb Films Grown On Pdms

ACS APPLIED MATERIALS & INTERFACES(2021)

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摘要
We demonstrated a convenient method via applying uniaxial tensile strains to continuously tune the high-frequency properties of flexible magnetic films. CoFeB films were magnetron sputtered onto prestretched polydimethylsiloxane (PDMS) membranes. They exhibit a self-assembled periodic wrinkling surface structure because of the large mismatch of Young's moduli between the elastomeric PDMS substrates and the metal layers. The wrinkling morphology and the residual tensile stress caused by the Poisson effect can be continuously tuned by a uniaxial stretching strain less than the growth prestrain, which consequently results in changes in high-frequency performance. The initial permeability and the ferromagnetic resonance frequency of flexible CoFeB thin films can be monotonously tuned in wide ranges of about hundreds and 1 GHz, respectively. A good repeatability over thousands of stretching-relaxing cycles has been demonstrated without any obvious reduced high-frequency properties. This flexible CoFeB films with excellent stretching-tunable high-frequency performances are promising for application in flexible and tunable microwave devices.
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关键词
stretching tunable, high frequency, flexible magnetic films, wrinkling topography, CoFeB
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