Nems Sensors Based On Suspended Graphene
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)（2021）
摘要
Graphene has exciting potential in nanoelectromechanical system (NEMS) applications due to its unique mechanical and electrical properties as well as its ultimate thinness. In this paper, we discuss the potential of using suspended graphene structures in NEMS sensors and provide an overview of our previous research results on piezoresistive graphene NEMS sensors, including pressure sensors and accelerometers.
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关键词
electrical properties,suspended graphene structures,piezoresistive graphene NEMS sensors,pressure sensors,accelerometers,nanoelectromechanical system applications,mechanical properties
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