Desig Of A Novel Closed-Loop Electrostatic Voltage Sensor Based On Weakly Coupled Resonators

A novel high-performance closed-loop electrostatic voltage sensor based on electrically weakly coupled resonator was designed. The MEMS static voltage sensor is designed based on mode localization effect. A three-degree-of-freedom micromechanical sensor which is weakly coupled by electrostatic voltage was fabricated to achieve high-sensitivity voltage measurement. Currently under the open-loop test, the sensor can achieve voltage measurement with a sensitivity of 0.0967/V and a linearity of 6.11%. The experimental results show that the voltage sensitivity of the sensor based on the amplitude ratio output is 87.9 times higher than the sensitivity based on the frequency output.