Frontiers in Low-Frequency Noise Research in Advanced Semiconductor Devices

Eddy Simoen,Anabela Veloso,Barry O'Sullivan,Kenichiro Takakura,Cor Claeys

2021 China Semiconductor Technology International Conference (CSTIC)（2021）

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摘要

The paper gives an overview of low-frequency noise studies in advanced semiconductor devices, targeting at different applications. As will be shown, the choice of substrate (bulk Si versus SOI) determines to a large extent the noise behavior of Gate-AII-Around (GAA) Vertical Nanowire (VNW) FETs. While no shot noise above 100 Hz is found for devices on SOI, the dominant flicker noise is of number f...

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关键词

Performance evaluation,Spectroscopy,MOSFET,Fluctuations,Semiconductor devices,Logic gates,Tools

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