Reduced Switching Current Density and Improved Interface Quality using Oxynitride Tunnel Barrier in Magnetic Tunnel Junctions for MRAM Application

2021 Device Research Conference (DRC)(2021)

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摘要
Magnetic tunnel junctions (MTJs) have recently been commercialized for memory applications, both as read-head sensors and non-volatile magnetic random-access memories (MRAMs) [1] . The key parameters of MTJs are resistance area (RA) product and write/switching current density ( J C ), which affect the device failure and decrease the stability due to localized heating. The RA and J C are critically...
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