Piezoelectric Micromachined Ultrasonic Transducers For Range-Finding Applications

David A. Horsley,Richard J. Przybyla,Stefon E. Shelton,Fabian T. Goericke,Benjamin E. Eovino, Michael Alex, John Logan

2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM)（2021）

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摘要

This paper presents the basic design equations and equivalent circuit model for piezoelectric micromachined ultrasonic transducers (PMUTs) used in time-of-flight range-finding applications. A model for acoustic propagation loss is shown and compared to experimental results for a commercially-available PMUT-based time-of-flight sensor operating to a maximum pulse-echo range of 5 m.

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关键词

MEMS, ultrasonic sensors, piezoelectric devices

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