【Highlight】High-aspect etching of b-Ga2O3 by hydrogen atmosphere anisotropic thermal etching (HEATE)Yuuki Ooe, Yuske Namae,Akihiro Matsuoka,Yusei Kawasaki,Daichi Ito, Yuuta Moriya,Rie Togashi,Akihiko KikuchiThe Japan Society of Applied Physics（2019）引用 0|浏览6暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
