Delamination of Large Area Layers of Hexagonal Boron Nitride Grown by MOVPE
Acta Physica Polonica A(2021)
摘要
The possibility to fabricate van der Waals heterostructures on the wafer-scale would open up a wide range of potential applications. Hexagonal boron nitride (hBN) is one of the most important components in many structures of this kind. Obtaining high quality hBN and the ability to transfer large areas to arbitrary surfaces is a must for future applications of many less durable and less stable van der Waals materials. In this work, we point out key factors that allow us to delaminate large areas of hBN layers grown by metal-organic vapor phase epitaxy on two-inch sapphire substrates. Using scanning electron microscopy and X-ray diffraction, we also compare hBN layers before and after the delamination process.
更多查看译文
关键词
delamination,boron nitride,MOVPE,large areas
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要