Epitaxial Molybdenum Disulfide/Gallium Nitride Junctions: Low-Knee-Voltage Schottky-Diode Behavior At Optimized Interfaces

ACS APPLIED MATERIALS & INTERFACES(2021)

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摘要
Low turn-on (knee) voltage (similar to 0.3 V) Schottky-diode behavior of a four-layer (4L) MoS2/GaN junction is achieved by optimizing the in situ interface preparation of the GaN substrate prior to MoS2 overlayer growth in a vacuum system using metallic molybdenum and hydrogen sulfide gas as precursors. The process leads to a clean nitrogen-terminated GaN surface that bonds well to the MoS2 film revealing a 2 X 2 reconstruction at the interface observed in low-energy electron diffraction (LEED). Atomic force microscopy and X-ray photoelectron spectroscopy provide clear images of the GaN terraces through the MoS, overlayer confirming close adhesion and absence of oxygen and other contaminants. Density functional theory calculations predict the formation of the 2 X 2 superstructure at a clean interface. Transport measurements show diode behavior at an on/off ratio of similar to 10(5) for +/- 1 V with a forward direction for the positive voltage applied to the MoS2 layer. Combining transport and photoelectron spectroscopy measurements with theory, we deduce a Fermi-level position in the WS, gap consistent with interface charge transfer from MoS2 to the substrate. The high performance of the MoS2 /Gan diode highlights the technological potential of devices based on GaN/MoS2 interfaces.
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关键词
heterostructures, diodes, 2D, materials, interface characterization, transport measurements, low-energy electron diffraction, chemical vapor deposition, epitaxy
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