A Micromachined Resonant Micro-Pressure Sensor

This article presents a micromachined resonant micro-pressure sensor, which consists of a SOI wafer for pressure sensing and a glass cap for vacuum packaging. More specifically, two resonators fabricated in device layer of SOI wafer were positioned around the center and border of pressure-sensitive diaphragm respectively with the purposed of transforming pressure. Simulations based on finite eleme...