Enhanced Sensitivity and Stability of a Novel Resonant MEMS Electric Field Sensor Based on Closed-Loop Feedback

Xiangming Liu,Zilong Wang,Zhengwei Wu,Yahao Gao,Simin Peng,Ren Ren,Fengjie Zheng,Yao Lv,Pengfei Yang,Xiaolong Wen,Shanhong Xia,Chunrong Peng

IEEE Sensors Journal（2021）

引用 10|浏览18

暂无评分

摘要

To improve the sensitivity and stability, a novel mode-localization resonant MEMS (Micro-Electro-Mechanical System) electric field sensor based on closed-loop feedback is presented in this paper. The sensor is based on the principle that the mode localization effect can dramatically increase the sensitivity of a resonant system. Moreover, in order to detect the electric field in real-time and impr...

查看译文

关键词

Sensors,Electric fields,Sensitivity,Perturbation methods,Micromechanical devices,Resonant frequency,Location awareness

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要