Physics Based Modeling of Electrostriction Based BAW Resonators

In this work, a nonlinear circuit model has been developed to account for the full electrostriction coupling physics in ferroelectric bulk acoustic wave (BAW) resonators. This new model divides the BAW resonator into thin layers and locally treats the full electric field and strain in the electrostrictive relations, starting from the P-expansion of Landau free energy. The response from the simulation is compared against the measurement results obtained from a barium strontium titanate (BST) film bulk acoustic resonator (FBAR) across different biasing levels.