A mmWave Switch Using Novel Back-End-Of-Line (BEOL) in 22nm FinFET Technology

Qiang Yu,Jeffrey Garrett, James Waldemer,Yunzhe Ma,Surej Ravikumar,Guannan Liu,Said Rami

2021 IEEE MTT-S International Microwave Symposium (IMS)（2021）

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摘要

This paper presents a mmWave switch designed using novel back-end-of-line (BEOL) in Intel 22nm FinFET (22FFL) technology. In the newly developed mmWave BEOL, ExpressVia is introduced, which allows direct transistor connection to thick metal layer. Continuous via and 3+1 thick metal layers are also enabled to provide design flexibility. Taking advantage of the new features, an ultra-wideband (DC-60...

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关键词

Microwave measurement,Metals,Switches,Insertion loss,FinFETs,Frequency measurement,Transistors

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