Energy-Efficient CMOS Humidity Sensors Using Adaptive Range-Shift Zoom CDC and Power-Aware Floating Inverter Amplifier Array

This article presents an adaptive zoom-capacitance-to-digital converter (CDC)-based CMOS humidity sensor. The humidity sensor is realized by means of two differential capacitors whose dielectrics are sensitive to humidity. The sensing capacitors are interfaced with a zoom CDC, which consists of a successive-approximation-register (SAR) analog-to-digital converter (ADC) and a 3rd-order delta–sigma ...