A Magnetic Field Cancelling System Design for Mitigating Extremely Low Frequency Magnetic Field in a High Tech Fab
2021 Asia-Pacific International Symposium on Electromagnetic Compatibility (APEMC)（2021）
摘要
A magnetic field cancelling system (MFCS) integrated the active magnetic cancelling system (AM CS) and the passive magnetic cancelling system (PMCS) is addressed in this paper. For the design of the AMCS, an embedded system with the square Helmholtz coil structure is realized. In order to achieve the fast response of the AMCS against the extremely low frequency magnetic field (ELFM) change, a real...
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关键词
Extremely low frequency magnetic,ELFM,active magnetic cancelling,passive magnetic cancelling,high-tech fab facilities
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