Stabilized control of electromagnetic micro-mirror
2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)（2021）
摘要
In this paper, the stabilized control of electromagnetic scanning micro-mirror (EMSM) which has underdamped and hysteresis feature leading to undesirable oscillation and positioning error is investigated. In order to propose a model-based stabilized control scheme, a Hammerstein model with hysteresis is established for EMSM system. Then the pseudo linearization method is used to analyze the EMSM. ...
更多查看译文
关键词
Hammerstein systems,hysteresis,micro-mirror,stabilized control,Lyapunov method
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要