Oxide Semiconductor Thin-Film Transistors with Nano-Splitting and Field-Surrounding Channels Fabricated by Subwavelength Photolithography
JOURNAL OF PHYSICS-MATERIALS（2020）
Key words
thin film transistor,oxide semiconductor,nanostructure,subwavelength lithography,device simulation
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined