Discussion Of Supersmooth Optics Element Testing Technique
ISTM/2005: 6th International Symposium on Test and Measurement, Vols 1-9, Conference Proceedings(2005)
Abstract
The countries all over the world attach great importance to the research of the processing and testing technique for the supersmooth surface optics element. This paper presents the application of the supersmooth surface in a great deal of scientific and technological fields. And combines with the instance of the super-ring. surface optics element, research the testing technique of the synchronous radiation supersmooth optics element, including the measurement of large curvature radius, the shape error and the roughness of surface.
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Key words
supersmooth, roughness, super-ring
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