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Properties Of Inorganic Films Prepared By Cat-Cvd

Hideki Matsumura,Hironobu Umemoto,Karen K. Gleason,Ruud E. I. Schropp

CATALYTIC CHEMICAL VAPOR DEPOSITION: TECHNOLOGY AND APPLICATIONS OF CAT-CVD（2019）

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Abstract
In the previous chapter, the reaction process of source gases is explained in detail. The features of catalytic chemical vapor deposition (Cat-CVD) films are all determined by the reaction process of the source gases, as briefly mentioned in the final section of the previous chapter. Here, the properties of individual films prepared by Cat-CVD are mentioned in detail. The reader will understand that the features of Cat-CVD films are strongly affected by the reaction processes.
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